Plenary Lecture

Plenary Lecture

Micropattern Fabrication by Masked
Excimer Laser Dragging

Professor Hong Hocheng
Co-author: K. Y. Wang
Department of Power Mechanical Engineering
National Tsing Hua University
Hsinchu, Taiwan


Abstract: Micromachining has been successfully achieved by excimer laser machining of various materials. An excimer laser dragging process to ablate a groove pattern on a polymer sheet through a mask opening is presented in this paper. The material PC is used in this study because of its good absorption coefficient for ultraviolet light and the excellent optical properties at the wavelength of 193 nm. A large number of papers have studied the interaction between the laser machining parameters and various materials. However, the prediction of the cross-sectional profile after the laser dragging is rarely reported for the fabrication of micro-patterns. This work predicts the profile made by the excimer laser dragging process with various masks. A mathematical model describing the relationship between laser machining parameters and the produced profile is constructed. The proposed model shows how the machined profile is determined by the machining parameters. To fabricate a complex micro-component, a method with multi-path scanning in different directions is envisioned based on the modeling of the machined profile from single-path dragging. The laser machining parameters include the dragging velocity, pulse repetition rate, pulse number, fluence and the opening dimensions of the mask pattern. The experimental results confirm various machined profiles can be effectively predicted in laser dragging. The analytical approach can be reversely utilized to design and fabricate the micropatterns in proper shapes with desired function.

Brief Biography of the Speaker:
Professor Hong Hocheng has published more than 200 journal/proceedings papers and 20 patents in the area of manufacturing. His research interest lies in the innovative manufacturing processes. He obtained his B. Sc. from National Taiwan University, Taiwan, and later his Diplom-Ingenieur from Technische Hochschule Aachen, Germany. He received Ph. D. from University of California, Berkeley. Presently Dr. Hocheng is Chair Professor at National Tsing Hua University. Prof. Hocheng received Outstanding Research Awards and Special Research Fellow Awards from National Science Council of Taiwan and Outstanding Professor Award from Chinese Institute of Engineers and Chinese Society for Mechanical Engineers. Prof. Hocheng is international renown recognized by Prof. Fryderyk Staub Golden Owl Award from Poland. Prof. Hocheng serves as the regional editor of International Journal of Manufactue & Machine Tools, and the editorial board member of 11 international journals including The Journal of Machining Science and Technology, International Journal of Machining and Machinability of Materials and International Journal of Nanotechnology.



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